Point of Use, Low Cost Delivery and Recapture for Semiconductor Wet Benches

MEI ‘s MultiChem systems provide a low cost alternative to the facility room 55 gallon drum system for wet processing systems. MultiChem systems provide pumped chemical delivery capability for smaller wet bench systems with localized needs, while providing recapture (reclaim) capability via use of 5 gallon chemical carboys.

MEI MultiChem Chemical Delivery Systems for Semiconductor Wet Bencheschemical spiking

Efficiency of Carboy Delivery and Reclaim

  • Low cost alternative to 55 gallon drum systems
  • Eliminates costs, waste, inefficiencies and quality control issues of bottle systems
  • Recapture capability when chemical can not be drained to a facility drain
  • Cabinet provides for carboy spill containment
  • No spill quick connects

Multiple Chemicals with Tight Controls

  • Multiple modules can be operated from a single wet station or controller
  • Designed for chemical deliveries and optional waste recapture with two or more 5 gallon carboy bottles
  • Graphical touch screen control from wet station computer running Microsoft Windows XP and MEI IDX automation software
  • Utilizes Leither capacitance sensors and load cell scale assemblies for carboy bottle level indication
  • For use with MEI systems or other OEM systems using IDX software

Tailored

  • MEI will create chemical delivery systems to fit your chemical process needs and production floor design via our partnership design process

    Carboy Delivery System

  • Optional chemical filtration and recirculation
  • Pump options to fit your existing spares stock
  • Multiple system “kiosk” remote control interface provides E-Stop capabilities as well as status notification
  • Pressurized systems with programmable mixture control

Production Ready

  • Quality, ergonomics and safety are designed into every system
  • Easy to navigate touch screen controls
  • Graphical touch screen controls on computers running Microsoft Windows XP® and MEI IDX Automation software
  • Space efficient; MEI’s space saving cabinets fit easily into tight work spaces
  • Valve manifold boxes are available  from 3-12 sticks to maximize delivery capability
  • Control systems seamlessly integrate with all MEI Wet Process Systems and all other vendors wet processing systems utilizing dry contact ready/request signals

Designed for Safety

  • Conforms to SEMI S2 standard

    Wet Bench Chemical Delivery System

  • MEI is a UL certified panel manufacturer
  • Internal spill and leak detection for all chemical handling compartments
    (facilities, pumps and carboys)
  • Local and remote EMO shut down with low voltage circuit
  • Exhaust differential pressure monitoring
  • Cabinet acts as spill containment with minimum 125% capacity
  • Visual alarm light tower with integrated audible alarm
  • Electronics housed in separate N2 purged compartment
  • Choice of materials, FM4910 (Halar, CPVC, PVDF) polypropylene or stainless steel
  • Manual and pneumatic isolation valves for each chemical delivery point are supplied

Maintenance Friendly

  • Easily removable access panels provide front and side access to internal components
  • Easy to access pumps and valves allow for excellent MTTR, improving uptime
  • Casters with leveling feet for ease of installation

Reliable

  • Field proven designs and safety features
  • Highest quality plumbing components
  • All metal components are either chemical resistance epoxy powder coated or anodized for longevity
  • Nitrogen purged electronics compartments
  • Load cells utilized for carboy level detection provide for a simple robust design

Supported

  • MEI provides award winning service, installation and support
  • Installation included
  • Operations manual and complete design documentation provided

Download our MEI MultiChem Brochure