Wet Process Systems- Wet Bench

A full line of Semiconductor Wet Bench Equipment to meet your needs

Automated, Semi-Auto, Manual

Linear, Rotary,

Modular, Small Footprint, Dry in Dry out,

PVDF, PVC-C, Stainless: All Tailored.

MEI’s wet processing and wet bench systems provide you with affordable, high-quality semiconductor and batch immersion process tools that perform safely and reliably.  All semiconductor equipment is custom tailored to your processes and chemistry, with options like megasonic and ultrasonic tanks and baths, custom robots, materials choices, venting options, ergonomic and safety features and more.

Explore our modular Wet Process Systems and Wet Bench Solutions by platform:

Evolution	Revolution
Automated Wet Bench Multi-step In-line transfer mechanism Solar option	Automated Wet Bench Multi-step Rotary transfer mechanism
Advancer	Advancer Micro
Semi-Automated Wet Bench Single-step Modular-Linear Small footprint	Narrow 2 ft (60cm) Semi-Auto Wet Bench Single process and Rinse Tanks

Each Wet Bench system is designed and tailored to meet your process needs.

MEI wet benches and wet processing systems are installed in major semiconductor, medical and solar fabs across the industry, worldwide.

Wet Bench for Semiconductor Etch, Clean & Strip, Solar Wafer Processing, Medical Device Production, Parts Cleaning and Other Applications

In addition to semiconductor wafer processing, we build custom wet process systems for use in medical parts and devices cleaning, MEMS, BioPharma production, life sciences research, solar cell production, parts cleaning and other application industries. Solar applications can include glass etch and damage removal etch.

Wet Bench Sample Process Applications:

• Etching: Oxide, Nitride, Silicon Etch

• Stripping: Acid Resist Strip, Solvent Resist Strip

• Cleaning: Pre-diffusion, Pre-Epi, Pre-photo, Photomask Clean, Wafer Reclaim, Post-Saw Clean and Pre-Panel Build Clean

MEI has extensive experience in creating semiconductor wet bench equipment, tanks and baths for any processes.  We can handle most acids, solvents and chemicals in ultra-clean, ultra-pure environments.  Our safety record is outstanding,  and we pay attention to wet bench reliability, maintainability and cost of ownership. We offer an array of material choices including: FM4910 (Halar, CPVC, PVDF), Polypropylene or Stainless Steel.

Tailored Design and Integration of Wet Process Semiconductor Equipment

MEI’s wet benches, wet processing systems, batch immersion systems, chemical delivery systems and chemical handling equipment are fully customizable semiconductor equipment, tailored based upon the specific intended use and footprint constraints of your fab. We collaborate on wet bench design through our design partnership process.  All of our wet bench systems are designed to be used with our bulk or bottle automated chemical delivery systems Integrated chemical delivery and wet process systems can be controlled with a common controller using MEI’s IDX Automation Software.

Download our MEI WetProcess System – Wet Bench Overview Brochure