Solar Evolution: Solar Cell Photovoltaic Manufacturing Equipment

MEI Solar Evolution | Optimized for Solar PV Wafer Clean and Etch

Automated Semiconductor Wet Bench
The MEI Solar Evolution high throughput wet processing systems are in-line, configurable, automated, dry to dry  modular, linear batch immersion systems made for high throughput at a low cost. They are designed to handle photovoltaic/ solar wafers for many applications.

Designed to maximize throughput and yield.

  • Custom process design for many solar manufacturing applications
  • Low cost of ownership
  • High reliability
  • Designed for Safety
    • Fail Safe automation interlocked to prevent operator access
    • Break away end effectors
    • Top or rear exhaust options with optimum air flow
  • Unique DRYING system, providing minimum Oxide growth.
  • Flexible Process design -Acidic or alkaline etching Multiple recipe management

(photo shown is one implementation: System layouts and features configurations vary)

MEI’s Solar Evolution fully automated solar wafer cleaning system

Dry to Dry, High Throughput, Process Multiple Lots and Recipes Simultaneously

For Solar wafer processing, the MEI Solar Evolution provides higher throughput, because it is able to process multiple lots and multiple recipes simultaneously, using the sophisticated process controls of MEI’s proprietary IDX Automation Software.

MEI Solar Evolution features:

Solar Wafer Cleaning Basket

  • High throughput with multiple robots
  • 200 wafer carrier cassettes
  • Extra wide tanks for multiple carriers
  • Input and output scales for wafer thinning metrics
  • Six inputs and outputs with automated staging
  • Top or rear exhaust connections available

All of MEI’s Wet Benches, Wet Stations and Wet Processing Equipment Are:

  • Flexible and Upgradeable
  • Easy to Use and Well Controlled
  • Tailored
  • Production Ready
  • Designed for Safety
  • Maintenance Friendly
  • Reliable
  • Supported
  • More about our Features & Benefits and Design Process

Download our Evolution Wet Processing System Brochure